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Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO 2 /Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was...
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