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High quality multilayers of barium ferrite (BaM) and barium strontium titanate (BSTO) were grown in optimized conditions on thermally oxidized Si(100) and Al 2 O 3 substrates using magnetron sputtering. As-grown films were amorphous and different annealing procedures were explored to stabilize crystalline phases. BSTO and BaM phases were identified using X-ray diffraction and cross-sectional...
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