Spatially ordered growth of InAs quantum dots (QD) was demonstrated via metalorganic vapour phase epitaxy on step-bunched vicinal GaAs substrates. Regular terraces of step-bunched surfaces were achieved by growing on GaAs (100) substrates off-oriented 2 o , 4 o and 6 o towards the <110> and <111> directions, thus serving as in situ templates for the growth of the QD layer. Multilayer stacks of strain-aligned QDs were successfully grown to improve the size homogeneity and therefore optoelectronic properties. Furthermore, the possibility of fabricating laterally ordered quantum wires (QWR) in the same manner was shown.