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A new approach toward the generation of wide-format directed fluxes of low-temperature plasma outside the interelectrode space and a corresponding gas discharge device to be used for the formation of micro- and nano-sized diffraction patterns on wide-format wafers have been proposed based on the analysis results of gas discharge devices that generate the ion–electron beams under high-voltage gas discharge.
The source of electro-coagulation boron waste (ECBW) is wastewater. In order to remove boron from wastewater, boron carried to mud in the form of industrial solid waste is rinsed through electro-coagulation method. The dielectric dispersion properties of the ECBW were analyzed determining the parameters such as complex dielectric functions, dissipation factor and surface conductivity. It is found...
The surface passivation is one of the crucial steps to achieve high conversion efficiencies in c-Si solar cells. Though thermal silicon oxide (SiO 2 ) and silicon nitride (SiN x ) provides a good passivation layer the high temperature process of SiO 2 and the fixed positive charge of SiN x on p-substrate cause detrimental effect in surface passivation. A thermally stable...
Selecting a suitable model is important for the quick and accurate calculation of the pumping characteristics of a turbomolecular pump (TMP). Three different calculation models (2D, ideal 3D, and real 3D models) in the free molecular flow range were investigated in this study through the Monte Carlo method. Results show that when blade velocity ratio C ≤ 1, the simple ideal 3D model with paralleled...
Ni 3 Al thin films and Ni 3 Al/Cr multilayer films with a chemically ordered intermetallic Ni 3 Al phase were deposited on NO6625 alloy substrates by magnetron sputtering at 400 °C. Compared with the single layers, the multilayer samples show superior high-temperature oxidation resistance and mechanical properties. Both of the samples can prevent the substrate from being drastic...
Layered films of Pt(15 nm)/Ag(x)/Fe(15 nm) with various Ag layer thicknesses (0 nm, 3 nm, 30 nm) were deposited at room temperature onto SiO 2 (100 nm)/Si(001) substrates. The films were post-annealed in the temperature range of 100 °C–900 °C for 30 s in high vacuum. The influence of the Ag interlayer on the L1 0 -FePt phase formation, as well as its structure and magnetic properties...
Thermal behavior of a glass–ceramic bonded thermal barrier coating (TBC) system was evaluated in terms of oxidation resistance and thermal gradient. It was observed that the weight gain of the glass–ceramic bonded TBC system was significantly lower than that of the conventional TBC system during thermal exposure of 500 h at 1200 °C. Thermal gradient between the top coat and substrate of the present...
A method to take into account the influence of the inlet/outlet ends on rarefied gas flows through moderately long capillaries proposed previously [Vacuum 97, 26 (2013)] is applied to gas flows through circular tubes. The method is based on the concept of effective tube length, representing a sum of its real length and an increment. To calculate the length increment, a flow field near the inlet/outlet...
Influence of magnetic field configuration on ring-shaped hollow cathode discharge has been investigated in order to perform high-density plasma sources under a low gas pressure of a few tens mTorr. Three typed arrangements of permanent magnets such as (a) NS-NS, (b) NS-SN and (c) NS are examined. The NS-NS arrangement has a divergent profile with a peak in axial direction in hollow cathode. The NS-SN...
Electron beam brazing (EBB) of 2 mm thick Zr 62 Al 13 Ni 7 Cu 18 bulk metallic glass (BMG) plate to Ti metal has successfully been accomplished by employing optimized electron beam brazing parameters and providing high cooling rate during solidification. The beam was irradiated 0.3 mm on the BMG side from the interface to avoid significant change in the chemical composition...
Trimethylaluminum (TMAl) pre-seeding time, an important factor in controlling the quality such as morphology and dislocation of AlN on Si(111) substrate, was systematically investigated. It was revealed that different TMAl pre-seeding time indeed lead to substantially different AlN quality in terms of morphology and threading dislocations. For the optimized TMAl pre-seeding time 40 s in this work,...
Cu 2 ZnSnS 4 (CZTS) films were fabricated from a ceramic quaternary target, through middle frequency magnetron sputtering. A post sulfurization process was applied for the sputtered films and sulfurization temperatures ranging from 460 °C to 580 °C were utilized. It has been found that obvious Zn loss exists during the sputtering, making the sputtered films become Zn poor although...
Absolute quantitative measurements of partial pressures with quadrupole mass spectrometers in industry have become increasingly important in the past decade. On the other hand, there is no broadly accepted method to calibrate quadrupole mass spectrometers and partial pressure measurements are not traceable to the SI. For this reason the ISO Technical Committee 112 for vacuum technology is taking steps...
Comb-like ZnO nanostructures are prepared by chemical vapor deposition in a quartz vial and characterized by a scanning electron microscope. The comb-like ZnO structures are several tens of micrometers. The lengths of the branches (nanowires) gradually decrease along the growth direction of the comb-like ZnO structures. The branches have uniform diameters and are evenly distributed on the belt-stem...
Nitrogenated carbon nanorods (NCNRs) with different structures were catalytically synthesized on the silicon substrate deposited with gold films in a plasma-enhanced hot filament chemical vapor deposition system, where methane, nitrogen and hydrogen were used as the reactive gases. The structure and composition of synthesized NCNRs were investigated by field emission scanning electron microscopy,...
Samaria-doped ceria (SDC)/La 1−x Sr x Co 1−y Fe y O 3−δ (LSCF) and yttria-stabilized zirconia (YSZ)/Ni were prepared as the cathode and anode of a solid oxide fuel cell (SOFC), respectively, using glancing angle deposition (GLAD) in electron beam physical vapor deposition. Fuel cell current–voltage measurements and electrochemical impedance spectroscopy were...
An investigation has been carried out for arsenic removal from a silver–copper ore. The copper ore was roasted in air, in nitrogen atmosphere and in vacuum at high temperature. It was found that arsenic was more easily removed in vacuum at lower temperature with shorter time. By suitably adjusting the main reaction conditions, almost 98.97% arsenic could be removed, while most of the sulfur was particularly...
The incorporation of Cu and O in CdTe films grown by rf sputtering using a target comprised of a mixture of CdTe and CuO powders is studied. The Cu and O contents ranged between 5 and 20 at.% and the temperature of the substrate was 250 or 300 °C. Energy dispersive spectroscopy data show the incorporation of Cu and O into the CdTe in a controlled manner. All films resulted polycrystalline with a decreased...
A nitrogen doped zinc oxide (ZnO:N) film was deposited on a quartz substrate at 773 K by reactive radio-frequency (rf) magnetron sputtering using mixture of nitrogen and oxygen as sputtering gas. Hall measurement results indicate that the ZnO:N film behaves p-type conduction after annealed at 923 K, which has the lower room temperature resistivity of 2.9 Ω cm, Hall mobility of 18 cm 2 /Vs...
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