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In the present study SiO x containing diamond-like carbon (DLC) films were synthesized by the closed drift ion source from hexamethyldisiloxane vapor. Kinetics of the growth of DLC films was investigated using optical emission spectroscopy (OES). Structure, chemical composition, electrical and optical properties of the synthesized films were studied. The effects of ion beam energy were investigated...
In this work, we report the laser irradiation effects on the properties of various types of amorphous hydrogenated carbon (a-C:H) films. The influence of the initial carbon film (hydrogen concentration, sp 3 /sp 2 ratio, and sp 2 clustering) is studied. The results show that a loss of hydrogen and an increase of the sp 2 phase are the main processes in the laser power...
In this study we investigated the nucleation of synthetic diamond thin films on Si substrates by double bias enhanced Hot Filament Chemical Vapour Deposition (HFCVD) method. First, we investigated the influence of the bias voltage and secondly the influence of the nucleation time under different bias voltages. The bias voltage was varied from −120V up to −220V as well as the nucleation time was changed...
Hydrogen-free carbon films with the various sp 3 bond fractions between 83% and 40% were prepared by mass-separated ion beam deposition (MSIBD). These sp 3 bond fractions were obtained by electron energy loss spectroscopy (EELS). Chemical bond analysis of these carbon films was performed by x-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and Raman spectroscopy,...
Deposition of Ti/C nano-composite DLC films by magnetron DC sputtering was examined using dual targets of titanium and carbon, in order to in order to investigate the effects of Ti/C nano-composite structure on its mechanical properties such as hardness or physical properties such as electrical resistivity. The deposition of DLC films or Ti/C nano-composite DLC films was respectively carried out in...
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