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Diamond-like carbon (DLC) films are prepared on Si substrates by a high-power pulsed magnetron sputtering and the microstructure is examined using Raman spectroscopy as a function of Ar gas pressure in the range of 0.11–0.52 Pa. Compositional analysis is also carried out by Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA). In the Raman spectra, disorder (D)...
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