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Selecting a suitable model is important for the quick and accurate calculation of the pumping characteristics of a turbomolecular pump (TMP). Three different calculation models (2D, ideal 3D, and real 3D models) in the free molecular flow range were investigated in this study through the Monte Carlo method. Results show that when blade velocity ratio C ≤ 1, the simple ideal 3D model with paralleled...
The Monte Carlo method is suitable to use for the problems of turbomolecular pumps (TMPs). This method has three calculation models, namely, the 2D, ideal 3D, and real 3D models. Theoretically, real 3D models demonstrate the real geometry of TMP and should be more accurate than 2D and ideal 3D models. In this study, a simple modified algorithm of a real 3D model based on that of Amoli et al. is used...
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