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The mechanism to decrease the electron temperature in an electron cyclotron resonance (ECR) plasma was numerically investigated using a fluid model. A mixture of argon and nitrogen was used as the working gas under the assumption of plasma nitriding by reactive sputtering. It was found that the power loss due to the vibrational excitation of nitrogen molecules by electron impact contributed to the...
The shape and plasma parameters in the afterglow region of a hybrid electron cyclotron resonance-direct current sputtering plasma system were in situ monitored during silver and silver-graphite coatings. The cylindrical symmetry of plasma needed for uniform deposition of semicircular plain bearings was achieved by adjusting the magnetic field and the working pressure. The relative concentration of...
An experimental investigation on the degree of molecular dissociation in a surface wave-driven discharge (ω/2π=2.45GHz) operating in N 2 -H 2 mixture at pressure p=(66.5-266Pa) is performed by means of optical emission spectroscopy. The dissociation degree of nitrogen molecules [N( 4 S)]/[N 2 ] increases with the amount of hydrogen (up to 50%) in the mixture in correlation...
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