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For measuring the current–voltage (I–V) characteristic curve with respect to flowing plasmas, a Langmuir probe, a conducting object, should be inserted to the region directly, and the interaction between the probe and the flowing plasma is not avoidable. This interaction can cause the serious problem for plasma diagnostics due to aerodynamic and thermal disturbances generated by inserting the metallic...
This paper studies the glow intensity distribution of the discharge plasma against the tube radius and reports the radial profiles of electron temperature and plasma concentration in the rf capacitive discharge registered with a Langmuir probe. An abrupt increase of electron temperature and glow intensity near the tube wall in the weak-current α-mode of the rf capacitive discharge is revealed, the...
Localized behavior of laser induced metallic plasmas has been investigated using Langmuir probe as an electrostatic diagnostic tool. A Q-switched Nd:YAG pulsed laser (1064nm, 12ns, 1.1MW) is tightly focused on metal targets (Cu, Zn, Cd, Ag, Pt and Au) having dimensions 2×2×0.2cm 3 under vacuum ∼10 −3 torr. The varying biasing voltages are applied to Langmuir probe. The electric signals...
Actinometry optical emission spectroscopy (AOES), single cylindrical Langmuir probe and electrostatic planar probe were used to investigate the active species (electrons, ions and atomic oxygen) of remote oxygen plasma in an RF (13.56 MHz) hollow cathode discharge system, as a function of applied power and gas pressure. The electron density and electron temperature were determined from Langmuir probe...
The time and space evolution of pulsed vacuum arc plasma parameters have been measured using a single cylindrical Langmuir probe in a free expansion cup. Electron density n e , effective electron temperature T eff and electron energy distribution function (EEDF) are derived from the I–V curves using Druyvesteyn method. Results show that during the discharge time, the electron density...
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