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Molecular dynamics (MD) simulations of large argon clusters impacting on silicon targets were performed. The characteristics of crater formation, a typical collisional effect with large cluster impact were examined from the viewpoint of incident energy, cluster size and incident angle. The MD simulation results suggested that the condition where an incident cluster penetrates into the solid target...
The interaction between an ethanol cluster ion beam and a silicon surface was investigated. The sputtering depth of a silicon surface irradiated with an ethanol cluster ion beam increased with acceleration voltage. The number of disordered atoms on the silicon surface irradiated with an ethanol cluster ion beam initially showed a small dependence on retarding voltage and then a steep decrease with...
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