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Three different types of non-oxygen containing monomers were plasma polymerised into thin films and then studied using X-ray photoelectron spectroscopy (XPS) to determine the surface oxygen content. These three monomers were benzene, ferrocene, and octafluorocyclobutane. Depth profiling was also used to investigate the oxygen content into the bulk of the films by analysing the newly formed film surfaces...
In this paper the effects of substrate temperature (room temperature – 350 °C) on the phase composition and crystallization orientation of the tantalum thin film deposited by direct current magnetron sputtering in an extremely low power deposition regime are presented. In this experiment, heating the substrates to 350 °C resulted in the growth of the hard and brittle tetragonal crystalline structure...
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