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In this work, properties of TiZrV getter films prepared on stainless-steel substrates by magnetron sputtering were investigated. Changes of sample surface during thermal activation and interaction of the activated getter with CO were studied by means of XPS and ESD of neutrals. The XPS measurements reflect the disappearance of the superficial oxide layer coveing air-exposed TiZrV surfaces and the...
Electron beam curing (EBC) is increasingly replacing the UV curing technique or is additionally used to achieve a high-quality surface coating. The EBC shows clear advantages and is a fast, clean and environmentally friendly technique, since the coatings possess no volatile solvents. The development of a new generation of low-energy accelerators EBOGEN, which operate with acceleration voltages up...
In this work properties of TiZrV getter films prepared on stainless steel substrates by magnetron sputtering were investigated. Changes of sample surface during thermal activation were studied by means of static secondary ion mass spectroscopy (SSIMS).The SIMS measurements reflect the disappearance of the superficial oxide layer covering air-exposed TiZrV surfaces. Two samples of different Ti:Zr:V...
Thin films of Zr 44 V 56 alloy getter films were prepared on stainless-steel substrates by magnetron sputtering. The getter activation behaviour was investigated by X-ray photoelectron spectroscopy and static secondary ion mass spectroscopy (SSIMS).Both measurements reflect the disappearance of the superficial oxide layer covering air-exposed Zr-V surfaces via consecutive...
Non-evaporable thin film getters of various compositions have been produced by sputtering. Among about 20 materials which have been studied, the lowest activation temperature (about 180 o C) has been displayed by a Ti-Zr-V coating obtained from a cathode made of intertwisted elemental wires. In order to optimize the vacuum properties of this film various production parameters, including the...
The results of the development of the high-frequency method in combination with a vacuum arc one for surface coating and surface modifications with pulsed plasma streams are presented. The combined method was applied for deposition of multi-layer coatings with a reduction of droplet formation and decrease of the substrate temperature. It provided metal and dielectric coatings under the substrate temperature...
We report on a study of structure, composition and mechanical properties of (Ti,Al)(B,N) coatings, deposited by reactive DC magnetron sputtering on Corning glass and AISI D2 tool steel substrates and their dependence on variations of nitrogen/argon flux ratio. The Ti–Al–BN target used was fabricated from a mixture of powders of Ti (70wt%), Al (15wt%) and BN (15wt%). The samples were found in the centre...
This paper presents an investigation regarding influence of substrate temperature during deposition on the characteristics of TiN/TiC bilayers grown by plasma-assisted pulsed arc discharge. The substrate temperatures were 50, 100 and 150°C. The gases used in the experiment were N 2 for TiN and CH 4 for TiC. These coatings were studied by X-ray diffraction techniques determining the...
In this study, chromium nitride coating was realized on AISI 1010 steels by nitro-chromizing treatment. Steel samples were tufftrided at 575°C for 2h in the first step of the coating process, and then chromized by pack method in the powder mixture consisting of ferro-chromium, ammonium chloride and alumina at 1000°C for 1–4h. Samples were characterized by scanning electron microscopy (SEM), Energy...
For the heavy ion program at CERN's Large Hadron Collider, lead–lead collisions with a design luminosity of 10 27 cm −2 s −1 are foreseen. This will be achieved after an upgrade of the ion injector chain where the Low Energy Antiproton Ring (LEAR) is currently converted into a Low Energy Ion Ring (LEIR). Avalanche-like heavy-ion induced molecular desorption, first observed...
Cr–B–N films were synthesized by unbalanced magnetron sputtering from a sintered Cr–B target with 20at% B in an Ar–N 2 discharge at varying N 2 partial pressures (pN2) of up to 64% of the total pressure (pAr+pN2=0.4Pa). Coating composition and microstructure were investigated by X-ray diffraction, X-ray photoelectron spectroscopy and wavelength-dispersive electron-probe microanalysis...
The principles of non-destructive, non-contact characterization of coatings by means of photothermal measuring techniques are briefly explained. A method of quantitative interpretation is presented, which relies on the relative extrema of the calibrated thermal wave phase lags measured as a function of the heating modulation frequency for coatings deposited by reactive magnetron sputtering. The application...
Si 3 N 4 tools were coated with a thin diamond film using a Hot-Filament Chemical Vapour Deposition (HFCVD) reactor, in order to machining a grey cast iron. Wear behaviour of these tools in high speed machining was the main subject of this work. Turning tests were performed with a combination of cutting speeds of 500, 700 and 900mmin −1 , and feed rates of 0.1, 0.25 and 0.4mmrot...
The thermal properties of (TiSi)N thin films deposited by dc reactive magnetron sputtering on steel have been measured using contactless modulated IR radiometry. To interpret the measured IR signals, a two-layer model has been applied, and to describe surface roughness effects related to the coatings' growth process, a three-layer model has been developed. Empirical correlations have been found between...
Target erosion in the straight section of a conventional and a novel rectangular magnetron cathode is simulated and tested. The simulation includes modeling the magnetic field, tracing electron trajectories with a fourth-order Runge-Kutta numerical method, predicting ionization distribution with a Monte-Carlo method etc. It is shown that the conventional and the novel magnetron cathodes yield a target...
In this study, we monitored the HfAlO 3 etch rate and selectivity to SiO 2 as a function of the etch parameters (gas mixing ratio, RF power, DC-bias voltage, and process pressure). A maximum etch rate of 52.6 nm/min was achieved in the 30% BCl 3 /(BCl 3 + Ar) plasma. The etch selectivity of HfAlO 3 to SiO 2 reached 1.4. As the RF power and the DC-bias...
The main aim of this work is the comparison among different methods for metal incorporation in Diamond-Like Carbon (DLC, fullerene-like) Carbon for improving the tribological properties. The films have been grown by Electron Cyclotron Resonance Chemical Vapour Deposition (ECR-CVD) applying a negative bias voltage to the substrate. Structural characterization of the samples was performed by Raman spectroscopy...
The embedding of metallic nanoparticles in the traditional optical materials (e.g. SiO 2 ) gives us the possibility to create new optical materials. Metallic particles of nanometric dimensions can be transparent in wide spectral ranges of light. The incorporation of nanocrystal inclusions in such nanocomposites provides the benefit of targeted manipulations of their macroscopic optical response...
Tungsten carbide-based coatings have been used in a wide variety of industrial applications such as high speed cutting tools, extrusion dies, drills, aerospace industries, and more. A few reports on ternary and quaternary coatings of WC with other elements indicate good prospects for these material systems. The present study focuses on the formation of quaternary WC–Cr–N and WC–Al–N coatings during...
Understanding the reaction between lubricant additives and diamond-like carbon coatings is imperative for the improvement of the friction and wear properties of mechanical parts with diamond-like carbon coatings. Diamond-like carbon coatings were deposited with ion beam deposition and the influence of lubricant additives on the friction coefficients and wear rates of diamond-like carbon coatings under...
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