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Vacuum gauges that control fast processes in industrial applications, e.g. load locks, should immediately react to pressure changes. To study the response time of vacuum gauges to rapid pressure changes, a dynamic vacuum standard was developed where the pressure may change from 100 kPa to 100 Pa within 20 ms in a step-wise manner or within longer times up to 1 s in a predictable manner. This is accomplished...
A linearity test of the quadrupole mass spectrometer signal can be performed by using the pressure generated by the flow rate of a secondary leak as a fix point and varying the flow rate by a primary gas flowmeter around this value. Applying this method, we have investigated three different quadrupole mass spectrometer in a range of helium partial pressures between 10 −9 Pa and 10 −4...
Absolute quantitative measurements of partial pressures with quadrupole mass spectrometers in industry have become increasingly important in the past decade. On the other hand, there is no broadly accepted method to calibrate quadrupole mass spectrometers and partial pressure measurements are not traceable to the SI. For this reason the ISO Technical Committee 112 for vacuum technology is taking steps...
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