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Quantification of hydrogen fraction in the gas mixture with inert gases kept in a small enclosure of the gas surge arrester (GSA) is a challenging task. Hydrogen greatly influences device properties, but as an omnipresent gas it represents also the background of any mass spectrometer. Hydrogen fraction in a particular GSA was quantified after its puncture in an evacuated batch inlet and subsequent...
A conventional residual gas analyzer (RGA) has been utilized for the measurement of gaseous substances of molecular weights far beyond the range of the instrument. The novel method, termed CPC (“crack-product calibration”), is based on the evaluation of just one or few selected crack products within the range of the RGA. Calibration is achieved by guiding a quartz-microbalance-controlled molecular...
A simple method to generate a standard partial pressure p s by using various gas species has been developed for in-situ calibration of IGs and QMSs. Generating p s requires both introducing a test gas with known flow rate Q and estimating the effective pumping speed S of the high vacuum pump. The former is realized by introducing a test gas through a standard conductance element (SCE)...
Rekindled interest has developed in pulsed vacuum systems due to their use for Xenon Difluoride (XeF 2 ) etching systems and their usefulness in the fabrication of MEMS and nanostructures. Despite numerous applications of pulsed vacuum systems, little information is available in the literature on their design considerations. In this paper mathematical models and their experimental verification...
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