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Permalloy thin films have many applications as sensors and actuators but the preparation of magnetic films by magnetron sputtering is problematic since the target material reduces or changes the magnetic configuration of the magnetron. Hollow cathode discharges can produce similar or greater plasma densities to that found in magnetron sputtering and can therefore be operated over a similar pressure...
Hydrogenated amorphous carbon nitride (a-CN x :H) films were deposited by plasma enhanced chemical vapor deposition (PECVD) in CH 4 –NH 3 system. The chemical composition and bonding configuration were investigated by XPS and FTIR. The results indicated that both sp 2 CN and sp 3 CN bonds generally increased with the increase of the nitrogen concentration, and...
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