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In this paper the effects of substrate temperature (room temperature – 350 °C) on the phase composition and crystallization orientation of the tantalum thin film deposited by direct current magnetron sputtering in an extremely low power deposition regime are presented. In this experiment, heating the substrates to 350 °C resulted in the growth of the hard and brittle tetragonal crystalline structure...
Thin films of ZnO of 20, 40,160 and 320 nm thickness were deposited on Si (100) substrates by rf-magnetron sputtering and then nanorods were grown on the seed layer at 95 °C for 2 h. The ZnO nanorods were synthesized in C 6 H 12 N 4 and Zn (NO 3 ) 2 ·6H 2 O solution by a hydrothermal method and the effect of seed layer thickness on the alignment, diameter,...
The beam skirt phenomenon of the primary electron beam induces some uncertainties in the microanalysis results when a gas with high atomic number is used. The radius of the skirt r s and the unscattered fraction were used to explain the relationship between theoretical and experimental results. The use of a gas with a low atomic number such as Helium, leads to accurate results. A new explanation...
Nanocrystalline silicon thin films (nc-Si:H) were deposited using He as the dilution gas instead of H 2 and the effect of the operating pressure and rf power on their characteristics was investigated. Especially, operating pressures higher than 4 Torr and a low SiH 4 containing gas mixture, that is, SiH 4 (3 sccm)/He(500 sccm) were used to induce high pressure depletion (HPD)...
Yttrium trioxide (Y 2 O 3 ) thin films have been deposited on silicon (111) at different RF powers and the sputtering pressures by RF magnetron sputtering. The influences of the RF power and the sputtering pressures on the structural and optical properties of Y 2 O 3 thin films were investigated by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic...
Seen from gas-liquid two-phase-flow system, the gas phase and liquid phase of bubble flow in weld pool are studied by means of isolated phase based on the conservation of mass and momentum. The two-dimensional fractional flow model of bubble flow in weld pool of vacuum electron beam welding is developed. And the gas distribution and the phenomenon of bubble flow in weld pool of AZ91D magnesium alloy...
In this research, we investigated the TaN etch rate and selectivity with under layer (HfO 2 ) and mask material (SiO 2 ) in inductively coupled CH 4 /Ar plasma. As the CH 4 content increased from 0% to 80% in CH 4 /Ar plasma, the TaN etch rate was increased from 11.9 to 22.8 nm/min. From optical emission spectroscopy (OES), the intensities for CH [431 nm] and...
Sputtering, a physical vapor deposition technique, is widely used for preparation of compound coatings. Binary, ternary or multi component compound coatings deposited by sputtering find a variety of applications. The properties of these coatings depend strongly on the composition of the films. A mathematical model has been developed to predict the composition of the metallic constituents of the coatings...
In the present study porous titanium condensates have been deposited by means of ion-plasma sputtering under the quasi-equilibrium conditions and their structure formation mechanisms have been investigated. At the beginning, we introduce to the low-dimensional porous system formation mechanisms, which are based on both the different rate growth of condensate surface local parts and partial coalescence...
The work presents results of the experimental investigation of vacuum sprayed yttria stabilized zirconia, nickel oxide, nickel (YSZ–NiO–Ni) ceramic composite coatings deposited on Al 2 O 3 ceramic and stainless steel substrates produced at different Ar and H 2 gas flow rates. The Ar and H 2 gas flow was varied according to the factorial plan design. It is shown that...
Pd films were deposited on MgO-covered Mg substrate by the thermal evaporation method under high vacuum conditions. The electronic and chemical properties of Pd structures with different Pd thicknesses were studied using X-ray photoelectron spectroscopy (XPS) and field emission-scanning electron microscopy (FE-SEM). For relatively low Pd thicknesses (<1 nm), separate Pd particles could be observed...
This paper investigates the effect of swift heavy ion (SHI) irradiation on surface morphology of Hydroxyapatite (HAp) thick films and modification in gas sensing characteristics. The HAp nanopowder is synthesized by wet chemical process and the thick films are prepared by screen printing technique. These films are irradiated with Ag 7+ ions with energy of 100 MeV at different fluences ranging...
Thin oxide films were produced by the exposure of polished, sputter-cleaned metallic surfaces kept in UHV to several thousands of Langmuirs at 10 −5 mbar oxygen yielding oxide layers of several nanometers. Metallic substrates used were iron, chromium and duplex stainless steel (DSS 2205). AES and XPS profiling analyses were performed. An attempt was made to use certain features observed in...
cBN/Si n–p heterojunctions have been fabricated and characterized. n-type cBN films were grown on p-type Si wafers using RF reactive sputter, and the n-type cBN films were obtained by adding S (sulfur) into working gas. The I–V (current–voltage) characteristics have obvious rectification. The fitting results show that the current transporting model for the cBN/Si n–p heterojunctions is the same as...
In the work a conception of a miniature, orbitron ion vacuum micropump for an integration with vacuum MEMS devices is presented. It is made of silicon and glass using microengineering technology. The main part of the device is a lateral field-emission source of electrons, which has been fabricated on oxidized silicon wafer. Both, cold cathode and anode of the source are made of thin gold layer using...
The aim of this study is to synthesis large area, plastic compatible of p-type nanocrystalline silicon through conventional sputter system. The growth of and p-type doping of nanocrystalline silicon onto plastic substrates using D.C. magnetron sputtering was investigated. The film properties were examined by Raman spectroscopy, X-ray Diffraction, scanning electron microscopy and energy dispersive...
Ni–Co coatings were produced on Cu substrates by electrodeposition from electrolytes with different pH values and different Co 2+ concentration. The current efficiency increases from 52.1% to 81.2% with the pH increasing from 2.0 to 5.4. It is clearly observed that the content of cobalt in the deposited coatings gradually increases from 9.4% to 19.6% as the pH value varies from 2.0 to 5.4...
Filament ion sources (FISs) have been used in the production of high current of H − ions for a wide variety of research fields and applications. The major deficiency in FIS performance is the escape of energetic electrons produced by filament striking with interior metal surfaces of the FIS. To avoid this problem, magneto-static fields produced by permanent magnets are used. Some kinds of...
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