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We investigated the etch characteristics and mechanisms of Ga-doped ZnO (Ga–ZnO) thin films in HBr/X (X = Ar, He, N 2 , O 2 ) inductively-coupled plasmas. The etch rates of Ga–ZnO thin films were measured as a function of the additive gas fraction in the range of 0–100% for Ar, He, N 2 , and O 2 at a fixed gas pressure (6 mTorr), input power (700 W), bias power (200 W),...
The main obstacle in the construction of primary vacuum standards for very low pressures – ultra-high vacuum (UHV) – is outgassing from the walls of the apparatus. Thus, principles utilising a higher pumping rate in the calibration chamber, e.g., the pressure ratio technique, seem to be more useful for this range. However, a serious problem is inherent in this method, namely, that the gas in the calibration...
The boron-doped SnO 2 (BTO) films were prepared by spray pyrolysis. The XRD results shows the preferred orientation of the BTO films changes from plane (110) to (101) as the increasing of boron concentration in SnO 2 , which further leads to the variation of grains shape on the surfaces. The FTIR and Hall-Effect results indicate the solution process: the boron ions prefer to occupy...
AlN/TiN bilayers were deposited on Si(100) substrates with varying laser pulse energy by laser molecular beam epitaxy (LMBE) technique, and their growth mode, crystal structure and optical properties were investigated. The results indicated that atomically flat TiN single films and AlN/TiN bilayers with layer-by-layer growth mode were successfully grown on Si(100) substrates at optimal laser pulse...
The tribological properties of nitrided layer and sulfurized-nitrided layer of AISI 4135 steel were investigated under oil lubrication, and the layers were prepared by the ion nitriding treatment and a two-step method as the ion nitriding plus sulfurizing duplex treatment, respectively. A ball-on-disc friction and wear tester was adopted to evaluate the tribological performance. Scanning electron...
Anatase nano-TiO 2 thin films were fabricated by reactive magnetron sputtering metal Ti target followed by thermal annealing in air at 450 °C for 2 hrs. The crystalline structure of the sample films were characterized by X-ray diffraction (XRD) and the hydrophilicity was characterized with the diameters of 1 μl water drop. The films were irradiated by oxygen plasmas and the effects of the...
Hydrogenated thin silicon nitride (SiN x :H) films were deposited by high frequency plasma enhanced chemical vapor deposition techniques at various NH 3 and SiH 4 gas flow ratios [R = NH 3 /(SiH 4 + NH 3 )], where the flow rate of NH 3 was varied by keeping the constant flow (150 sccm) of SiH 4 . The deposition rate of the films was...
In the present study, TiO 2 films were deposited on the surface of cenosphere particles using the modified magnetron sputtering equipment under different working conditions. The resulting films were characterized by field emission scanning electron microscopy (FE-SEM), Atomic Force Microscopy (AFM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The FE-SEM and AFM results...
The influence of carbon doping on tribological properties of CrCN coating was studied through preparation of coatings deposited on single crystal silicon and M2 high-speed steel (HSS) substrate using closed-field unbalanced magnetron sputtering ion plating technique. The friction coefficients were measured by pin-on-disc set-up and the wear traces of the coatings were observed by optical microscope...
Taking elemental antimony and tellurium as source materials, Sb 2 Te 3 nanopowders were prepared by vacuum arc plasma evaporation technique. Microstructure and morphology of the samples were characterized via X-ray diffraction and field emission scanning electron microscope. Compositional analysis was carried out by energy dispersive analysis of X-rays. Lattice constants (a = 4.267 Å,...
Current–voltage relations at different magnetron sputtering systems and gas mixtures were studied during reactive sputter deposition of titanium dioxide thin films. The main goal of this work was to investigate the influence of reactive gas mixture (Ar + O 2 ) and system geometry on the electrical characteristics of the discharge. The geometries utilized were the conventional magnetron sputtering,...
In this study the transmission probability for Knudsen diffusion through a single chamber-throat pore is simulated by the test-particle Monte Carlo method. The effects of the ratios of the length to the throat radius and the chamber radius to the throat radius on transport properties are investigated. The mechanisms affecting the transmission probability are revealed and discussed in detail. It is...
The out-of-plane and in-plane lattice parameters were measured by in-situ reflection high-energy electron diffraction (RHEED) at the initial growth stage of MgO thin films on SrTiO 3 (001) substrates in the growth mode of islands. The in-plane lattice was found to relax immediately after initiating the film deposition, and the majority of the in-plane strain was relieved at the film thickness...
Vacuum electron beam welding can have a low heat input, which means there is a minimum heat affected zone during welding of AZ91D magnesium alloy. From the observed microstructure, the weld of the AZ91D magnesium alloy can be divided into four regions, which are the weld metal zone, a partially-melted zone adjacent to the fusion boundary, a partially-melted zone adjacent to the base metal and the...
An W-10 wt.%Ti alloy target was prepared by the W–Ti ball-milled powders, and W–Ti thin films were deposited by dc magnetron sputtering on Si substrates. Then Cu/W–Ti/Si structures were prepared after Cu films were deposited on the W–Ti/Si structures. The results show that W–Ti alloy has a single phase structure with fine grain size. The structures of W–Ti thin films evolved from an amorphous film...
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