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Large area 3D masters, with dovetail like undercuts of definite geometries in the nanometer and micrometer range, are prepared in silicon substrates by laser ablation and anisotropic wet etching. These masters are replicated into thin polymer films on a Si substrate in a hot embossing process. Thermoplastic materials (PMMA and PS) as well as an elastomer (PDMS) are investigated. In contrast to the...
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