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An organic liquid polymer based on methyltriethoxysilane has been synthesized. The material;when spin-coated onto wafers and thermally treated;lead to dielectric films of low permittivity;which can be used in hydrogenated amorphous silicon (a-Si:H) thin film transistor (TFT) based large area imaging arrays as an inter-level dielectric between the TFT and pixel levels. Fourier Transform Infrared Spectroscopy...
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