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This work presents a simple and rapid lithography-free (i.e., maskless) microfabrication process for strain-sensitive aluminum gallium nitride (AlGaN)/GaN sensors. We microfabricated an AlGaN/GaN strain sensor through laser ablation of the underlying Si (111) substrate and direct bonding of aluminum wires to the sensor surface, creating a Schottky contact to the two-dimensional electron gas (2DEG)...
In this paper, fabrication of poly-(methyl methacrylate) (PMMA) retinal tack using x-ray lithography and long-term in-vivo biocompatibility evaluation is presented for progressive observation by optical coherent tomography (OCT). The PMMA is used to fabricate the retinal tack for its transparency, which is necessary for OCT. It is fabricated using x-ray lithography for an accurate micro-patterning,...
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