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In this work, we propose a damascene process to fabricate embedded gold micro- and nano-structures at the same time. We present a systematic study of the material removal rate (MRR) and the selectivity on both gold and silicon dioxide. The embedded microstructures are 2μm wide and 60nm deep, while the nanostructures widths vary from 70nm to 500nm for a 50nm depth. Moreover, we highlight the contribution...
This study reports micro-bending testing results of electrodeposited gold for applications as movable components in MEMS accelerometers. Cold-rolled gold was also evaluated to be used as a comparison with the electrodeposited gold. The specimens evaluated were micro-cantilevers having dimensions of 10×10×50μm3, which were fabricated by focused ion beam system. The bending test was conducted using...
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