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In this work, the ethanol sensing properties of field effect transistor (FET) sensors based on ZnO nanostructures were investigated at the room temperature and compared with those of based on ZnO thin film. ZnO thin film was deposited by RF magnetron sputtering. While ZnO nanostructures were prepared by a thermal oxidation technique. They were completely configured as the bottom gate FET structures...
In this study, the highly selective acetone gas sensors based on ZnO nanostructures with sputtered Pt and Nb were presented. The ZnO nanostructures were systematically prepared onto alumina substrates by a thermal oxidation technique at a working temperature of 500°C. Pt and Nb were then coated on the prepared ZnO nanostructures by a DC pulse sputtering technique. Their surface morphologies and chemical...
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