Effects of growth temperature on the structural and electrical properties of Li–N–H codoped ZnO thin films grown by DC reactive magnetron sputtering were investigated. Scanning electron microscopy and X-ray diffraction results showed that increasing growth temperature could improve the crystalline quality. But Hall measurement results showed that growth temperature had a nonlinear influence on the electrical property. The variation of electrical properties with the growth temperature was found to be related to the activated concentration of N in ZnO and the evaporation of Li during the growth process, derived from the Hall measurement and the second ion mass spectroscopy measurement.