Fine MoSi 2 powders containing a small amount of Mo 5 Si 3 have been prepared by self-propagating high-temperature synthesis (SHS), followed by spark plasma sintering (SPS) for 10min at 1200-1500 o C and 30MPa. Dense MoSi 2 materials, in which the grain size is ~7.5μm, have been fabricated at 1300 o C. They exhibit excellent mechanical properties: Vicker's hardness H v (10.6GPa), fracture toughness K I C (4.5MPam 1 / 2 ), and bending strength σ b (560MPa). The strength of 325MPa can be retained up to 1000 o C.