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A nonepitaxial (001) textured Fe-Pt alloyed film was obtained by annealing Fe/Pt multilayers in H 2 . No such nonepitaxial (001) texture was observed for similar multilayers annealed in N 2 atmosphere. Sensitive electron energy loss spectroscopy and the left shift of the L1 0 FePt (111) diffraction peak indicate oxidation in the N 2 annealed samples. The oxidation dramatically degrades the (001) texture of the Fe-Pt film and induces the composition change in the alloyed layer. The relation between the texture formation and oxidation was discussed.