Micro-scale TiO 2 crystal trees were fabricated on quartz glass substrates via atmospheric pressure plasma jet (APPJ) from the mixture gas of titanium tetrachloride (TiCl 4 ) vapor, argon and oxygen by one step. Small variations in deposition parameters have a dramatic effect on the structure of the deposits. The heights of these TiO 2 trees vary from several micrometers to over one hundred micrometers. The high resolution transmission electron microscope of the TiO 2 trees (HRTEM) clearly shows the lattice fringes, which serves as evidence that the TiO 2 trees are quite crystalline. The X-ray diffraction (XRD) and the selected area diffraction (SAED) results confirm the composition of anatase and rutile phase of these TiO 2 trees. This particular tree-like structure of TiO 2 shows a superhydrophobicity with water contact angle as high as 170°.