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Grain growth in CdTe films was studied by rapid thermal annealing of films prepared by co-deposition (at room temperature) of CdTe and CdCl 2 . Annealing conditions were varied to optimize the post-deposition heat treatment for obtaining CdTe films with larger grains. It was found that it is possible to obtain grains ~5 μm in size in CdTe films by the above techniques. Photoluminescence studies were used to derive information on the film defect structure.