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X-ray Diffuse Scattering (XDS) is presented, a technique, which determines the roughness, morphology and nanoparticle distribution of thin films. XDS is complementary to X-ray Diffraction and Reflectivity (XRD-XRR). The ability of XDS is demonstrated to investigate the films' nanoscale surface structure and to determine additional geometrical features such as correlation length and fractal characteristics...
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