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Nitrogen is one of the most important elements in Czochralski (CZ) silicon used in ultra-large scale integrity circuits (ULSI). In last decades, nitrogen-doped Czochralski (NCZ) silicon, which has been widely applied in microelectronic industry, has attracted much attention. In this presentation, the behavior of NCZ silicon treated in rapid thermal process (RTP) has been reviewed. The influence of...
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