The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A special methodology for determination of light element concentrations in subsurface layers of solids is developed. The clue of this methodology is simultaneous application of Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection (ERD). The first analytical technique is used as a tool enabling the precise measurement of the number of He ions irradiating the target whilst the second one is appropriate for an analysis of a target containing light elements. The measurements of atomic concentrations in amorphous hydrogenated silicon carbide (a-SiC x :H) and in amorphous hydrogenated carbon (a-C:H) were done applying the described method (results for a-SiC x :H only are presented in the paper). The possibility for high precision measurements of depth distributions of light elements is also discussed.