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We present a new experiment which is able to monitor mass-selected cluster depositions in real time using specular reflected thermal helium scattering. Ag 7+ with an incident energy of 2.86 and of 13.6 eV/atom is deposited on Pd(100) at different surface temperatures. The measurement technique relies on the large atomic cross sections Σ of adsorbates for diffuse helium scattering. An analysis of Σ shows that heptamers become fragmented upon impact for both energies and that some of the cluster atoms are implanted into the surface layer.