In this paper, the basic features of plasma polymerization of organic thin films are reviewed. Principal synthesis technologies generally used precursors and new developments in the 1990s are taken into account. Effects of plasma polymerization conditions on the structures and properties of the films are briefly discussed. Modern analytical techniques used for characterization of plasma polymer films, such as Fourier transform infrared and electron spectroscopy for chemical analysis, etc., are systematically reviewed. Physical properties, including surface properties, permeability, electrical and optical properties, are concisely described with the emphasis on the studies in recent literature. Some proposed applications of these films in mechanical, electrical and optical industry are presented.