Samarium-doped ceria (SDC) thin films were prepared from Sm(DPM) 3 (DPM=2,2,6,6-tetramethyl-3,5-heptanedionato) and Ce(DPM) 4 using the aerosol-assisted metal–organic chemical vapor deposition method. α-Al 2 O 3 and NiO-YSZ (YSZ=Y 2 O 3 -stabilized ZrO 2 ) disks were chosen as substrates in order to investigate the difference in the growth process on the two substrates. Single cubic structure could be obtained on either α-Al 2 O 3 or NiO-YSZ substrates at deposition temperatures above 450 °C; the similar structure between YSZ and SDC results in matching growth compared with the deposition on α-Al 2 O 3 substrate. A typical columnar structure could be obtained at 650 °C on α-Al 2 O 3 substrate and a more uniform surface was produced on NiO-YSZ substrate at 500 °C. The composition of SDC film deposited at 450 °C is close to that of precursor solution (Sm:Ce=1:4), higher or lower deposition temperature will both lead to sharp deviation from this elemental ratio. The different thermal properties of Sm(DPM) 3 and Ce(DPM) 4 may be the key reason for the variation in composition with the increase of deposition temperature.