Bi 3.15 Nd 0.85 Ti 3 O 12 (BNdT) thin films with predominant (104)/(014) orientation were fabricated directly on (111)Pt/Ti/SiO 2 /Si substrates through a sol–gel process. The volume fraction of (104)/(014)-oriented grains in the film was estimated to be about 65% according to X-ray pole figure. The BNdT film is dense and uniform and consists of columnar grains penetrating the whole film thickness. The (104)/(014)-oriented BNdT film capacitors showed excellent ferroelectric properties with 2P r =46.4 μC/cm 2 and E c ≈140 kV/cm. The films also exhibit excellent piezoelectric property, with high piezoelectric coefficient d 33 ≈17 pm/V.