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The homoepitaxial growth of SrTiO 3 (STO) films was investigated by a large-area pulsed laser deposition (PLD), which was in-situ monitored by a high pressure reflective high energy electron diffraction. By combining a conventionally continuous film deposition with a followed interval relaxation, a persistent layer-by-layer (LBL) film growth of more than 100 unit cells STO films was achieved...
Internal reflection ellipsometry was used for detection of the consecutive coating of two polyelectrolytes, poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA), onto a tantalum pentoxide (Ta 2 O 5 ) substrate until the 10th bilayer. The UV patterned PAH–PAA-multilayer was characterized in air via ellipsometry and atomic force microscopy. Suited optical models enabled...
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