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We present a surface X-ray diffraction and Auger electron spectroscopy investigation of antimony capping layers used to protect indium antimonide and gallium antimonide epilayers. A thermally induced amorphous to polycrystalline structural transition was observed at approximately 190°C for Sb caps on InSb(0 0 1) and GaSb(0 0 1) substrates. We conclude that 100nm Sb caps deposited at elevated substrate...
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