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Hydrogenated amorphous silicon (a-Si:H) films were prepared by catalytic chemical vapor deposition (Cat-CVD) with H contents as low as 3 at.%, with the H predominantly in the Si H bonding configuration. Initial dangling bond (DB) densities of less than 5x10 15 cm -3 and saturated DB densities of less than 4x10 16 cm -3 after light-soaking were obtained...
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