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We present an analysis of the mechanical properties of transparent conducting oxide (TCO), indium tin oxide (ITO) and indium zinc oxide (IZO) thin films on the glass substrates. The thin films of ITO and IZO were deposited by radio frequency magnetron sputtering at a low processing temperature. The elastic modulus and hardness of the TCO films prepared at different deposition conditions are determined...
The study examines the deformation between interfaces and the adhesion mechanism of multi-layer flexible electronic composites. Indium tin oxide (ITO), aluminum (Al), and zinc oxide (ZnO) were deposited on a polyethylene terephthalate (PET) substrate using radio frequency magnetron sputtering at room temperature to form flexible structures (e.g., ITO/PET, Al/PET, ZnO/ITO/PET, and ZnO/Al/PET) for piezoelectric...
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