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Carbon films have been synthesized on (100) Si substrates at room temperature by KrF Excimer Pulsed Laser Deposition (PLD) of highly oriented pyrolitic graphite. Changing laser power density (from 0.5 to 19 MW mm −2 ) and ambient conditions (vacuum; molecular nitrogen at 1 Pa; helium, from 0.6 Pa to 2 kPa), a range of structures and microstructures, from DLC to nanosized cluster assembled...
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