The oxygen transport was investigated for modelled interface of striped metal electrode on a solid oxide electrolyte by oxygen tracer exchange and three dimensional imaging techniques by using a secondary ion mass spectrometry (SIMS). The gold or platinum electrode on yttrium stabilized zirconia (YSZ) electrolyte were stable, and acted as a blocking layer of 18 O diffusion during the treatments in dry atmosphere at T=873K in p( 18 O 2 )=7kPa. The oxygen flow via triple phase boundary was clearly observed for both electrodes. The treatment in humid atmosphere (T=773K, p( 18 O 2 )=7kPa, p(H 2 18 O)=2kPa) raised the flux of oxygen diffusion through YSZ surface, however, it did not affect on the role of electrode on the oxygen transport properties.