Studies on the characteristics of 2010keV resonance in 24 Mg(p,p′γ) 24 Mg nuclear reaction for depth profiling Mg in thin films are reported. The resonance reaction, based on the detection of characteristic 1368keV γ-rays, enables interference free measurement of Mg down to 2×10 20 atoms/cm 3 and has a probing depth of about 20μm. The width of the resonance extracted from excitation curves for thick (>180nm) thermally grown elemental Mg films, by SPACES is about 350±50eV. The reaction has been used to depth profile Mg in a Mg/Ti/Mg/Si film which provides interesting information on interfacial mixing involving Ti layer and the underlying Mg layer.