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Thin CdTe films of 4-6 cm 2 each were quasi-continuously deposited in a series of up to 10 experiments onto CdS/ITO/glass substrates at 85°C in a membrane cell housing a four electrode assembly. The Cd and Te split anodic currents were regulated by an automatic current control unit connected to a potentiostat. The anolytic compartment with the less noble Cd electrode was separated by a cation exchange membrane from the catholytic compartment containing the other electrodes. Anolyte and catholyte were aqueous solutions of triethanolamine and different amounts of [Cd(TEA)] 2+ and TeO 2-3 . Depositions were carried out for 45-90 min at a potential of -1050 mV vs. sce (45°C). As-deposited layers contained finely grained polycrystalline cubic and hexagonal CdTe. Thermal annealing at 400°C in air and subsequent etching in K 2 Cr 2 O 72 SO 4 and N 2 H 4 H 2 O yielded cubic CdTe with a Te-rich surface according to x-ray diffraction and Raman scattering investigations. Au/CdTe/CdS/ITO test structures exhibited weak photoactivity.