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A width modulated design method is suggested for MITATT (mixed avalanche tunnelling transit time) and TUNNETT (tunnel transit time) mode devices which takes into account the loss in avalanche phase delay associated with the tunnelling current. The method has been applied to some double drift region (DDR) diodes for operation at 94 GHz atmospheric window. The results show that the new design method not only restores the optimum frequency enhanced by the tunnelling current to a pre-design value but also improves the device properties substantially.