Ultra-precision diamond machining with piezoelectric-assisted fast tool servo (FTS) was used to produce various free-form surfaces. A low cost, rapid and large area fabrication of uniform hydrophobic surface at room temperature which transfers the FTS fabricated sinusoidal grid surface to the flat film with UV-moulding process was described. A piezoelectric-assisted FTS with high band width of 2 kHz, travel range up to 16 μm and the compact mechanism structure was designed for the sinusoidal grid surface machining and the dynamic performance testing of FTS was described in detail. Machining results indicate that the dimensions of sinusoidal grid change with the variation of the FTS machining condition. Wetting properties of UV-moulded surface were evaluated, the best contact angle was measured to be 120.5° on the sinusoidal grid surface with profile wavelength of 350 μm and peak-to-valley amplitude of about 16 μm.