We have succeeded in fabricating (Hg,Re)Ba 2 CaCu 2 O y ((Hg,Re)-1212) thin films with smooth surface by a new process. The general process for the films consists of depositing precursor films and subsequent annealing in a quartz tube. However, when the film thickness was more than 100 nm, submicron-size defects such as outgrowths and pinholes appeared remarkably in the films. To prepare thicker films, we developed a following new method; (1) fabricating rather thin films (less than 100 nm) by above-mentioned process, (2) repeating the same process on the films. 150-nm-thick (Hg,Re)-1212 films were fabricated by repeating the 75-nm-thick process. The surface of the obtained films was quite smooth. Submicronsize defect were not found apparently by a scanning electron microscope (SEM) and a transmission electron microscope (TEM) observation of the surface and cross-section.