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Ta1−xZrxNy coatings were fabricated using reactive direct-current magnetron cosputtering on silicon and cemented carbide substrates. The oxidation resistance of the Ta1−xZrxNy coatings was evaluated by annealing the samples in a 15-ppm O2–N2 atmosphere at 600°C. The variations in crystalline structure, mechanical properties, and surface roughness values after annealing were investigated. One commercial...
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