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Superhard materials such as nanocrystalline cubic boron nitride (c-BN) and β-silicon carbide (β-SiC) as well as amorphous boron carbide (B 4 C) and highly tetrahedral amorphous carbon (ta-C) are produced by radio frequency (RF) unbalanced magnetron sputtering in combination with intense ion plating in a pure argon discharge. As a result of energy and mass analysis the film-forming fluxes Φ...
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