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Tantalum and titanium were implanted with different doses of N + ions at 70 keV, and the structural modifications of the targets were analysed by X-ray absorption spectroscopy (XAS) (EXAFS and XANES). The analysis requires the use of total yield detection and the correct calibration of the extraction depth of the XAS signal by means of MO/M standards (i.e. a metal oxide layer of known thickness...
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