The Be coating grown on K9 substrate are fabricated at different annealing temperatures by dc magnetron sputtering, and they are composed of α-Be phase with hcp structure from XRD analysis. As the in situ annealing temperatures increase from 60°C to 410°C, the coating surfaces show the transition from fibrous grains dominated by surface diffusion to diamond-like grains, and then to recrystallized grains dominated by bulk diffusion. For the coating cross-section morphologies, they are always characterized by the coarsening columnar grains with distinct boundaries. Both surface roughness and grain size increase with annealing temperatures, and obey the modified Anelli model. Moreover, the constitutive relationship of Be coating was explored. The residual stress is related closely to the microstructures and annealing temperatures, not only displays the tensile stress but also compressive stress. The compression–tension transition temperature occurs near 250°C (0.34T m ), which is just recrystallization transition temperature. The film electrical resistivity values decrease gradually with the increase of grain size due to the reduction of grain boundary.