(Fe,Ti)-N films with 15-20 at%. Ti concentrations were prepared on NaCl substrates by facing-targets sputtering (FTS). Analytical transmission electron microscope was used for the structural studies prior to and during in situ annealing of the samples. The (Fe,Ti)-N films contained α -(Fe,Ti) 1 6 N 2 and TiN phases at room temperature. The two phases remained stable during in situ annealing from room temperature to 700°C, and were unchanged when the samples were cooled down to room temperature. It was found that proper Ti addition can stabilize the α phase to a temperature of 700°C; such a high stability of the α phase in the (Fe,Ti)-N film is related to the formation of the TiN phase. The saturation magnetization at room temperature of the annealed sample was 2.3 T, which is larger than that of pure iron.